品名	Ｐ/Ｎ
AMAT SBC BOARD(V452, V440)	0090-76133
AMAT SBC BOARD(V452, V440)	0090-75014-A (V21)
AMAT VGA BOARD	0100-00793
AMAT VGA BOARD	0190-70102
AMAT VGA BOARD	0190-75084
AMAT VME BOARD	0190-22345
AMAT VME BOARD	0190-11528
AMAT A/O BOARD	0100-01894
SBC V452	0090-76133,0090-03467
SBC V440	0090-76109
SBC V21	0090-76111
VME PIII 400MHZ	0660-00032
MEI board	0190-14502
VGA video controller board	0190-75084,0190-70102,0190-76050 ,0100-00793
SEI Board	0100-01996,0100-00398
ANALOG I/O Board	0100-20100,0100-00825,0190-35653,0100-00396
Analog Input Board	0100-09054
Analog Output Board	0100-11001
Digital I/O Board	0100-20003,0100-76124
Digital I/O Board	0100-01321
Digital I/O Card	0100-11002
ASSY PCB STEPPER CNTRLR W/DAUGHTER CARDS	0100-00979
Stepper Controller Board	0100-20173
OMS Board	0190-01227,0190-76005
SERIPLEX MUX BOARD	0190-35651,300299-083
OTF Centerfinder Board	0100-76042,0100-01985
Chamber Interface 5200 HDP-CVD Ultima	0100-00493
Chamber Interface Board	0100-35250
Mainframe Interface Board	0100-00265
Analog Sync Detect Board	0100-20066
64 CHANNEL MUX Board	0100-20000
SERIPLEX MUX I/O Board	0190-35650,0190-35651
Seriplex SPX-MUXADIO-001	0190-35775
TC AMP Interlock	0100-00241
THERMALOGIC Board	0660-00221
Wafer Orienter Board	0100-76259,0100-20069
CONT ASSY,PRESS PNEU(AMAT CMP ANALOG BOARD, PNEUTRONICS)	0500-01091
AMAT INTER LOCK BOARD	0100-00573, 0190-00285
MKS CDN 396R BOARD	0190-24116
AMAT(300MM) PVD CHAMBER INTER LOCK BOARD REV02	0190-00285,0090-03868
PVD/IMP CHAMBER INTER LOCK BOARD	0180-00328,0100-20458
PED-BIAS CHBR I/L PCB BOARD	0090-03710
AS GAS HEATER CONTROL BOARD	0100-01911
INTL GAS HEATER CONTROL BOARD	0100-02048
AMAT CVD INTERGACE BOARD	0190-22844
MASA POWER SYS BOARD	0190-08875
HITACHI MMPC-03A BOARD	MMPC-03A
NIKON STEPPER BOARD	4S014-104 LASC-100 S91658302
NIKON STEPPER BOARD	4S007-395 LC PRESS 340504
PCB ASSY 5 PHASE STEPPER DRIVER INTERFAC	0100-35353
AMAT MONOCHROMATOR(EPD)	0010-00745,0010-09935,一般REPAIR(OH)
AMAT MONOCHROMATOR(EPD)	FULL O/H(PMT(PHOTO MULTIPLIER TUBE交換)

カテゴリー

基板(PCB）

タグ

NIKON半導体製造装置　修理