◆基板(PCB)修理

品名P/N
AMAT SBC BOARD(V452, V440)0090-76133
AMAT SBC BOARD(V452, V440)0090-75014-A (V21)
AMAT VGA BOARD0100-00793
AMAT VGA BOARD0190-70102
AMAT VGA BOARD0190-75084
AMAT VME BOARD0190-22345
AMAT VME BOARD0190-11528
AMAT A/O BOARD0100-01894
SBC V4520090-76133,0090-03467
SBC V4400090-76109
SBC V210090-76111
VME PIII 400MHZ0660-00032
MEI board0190-14502
VGA video controller board0190-75084,0190-70102,0190-76050 ,0100-00793
SEI Board0100-01996,0100-00398
ANALOG I/O Board0100-20100,0100-00825,0190-35653,0100-00396
Analog Input Board0100-09054
Analog Output Board0100-11001
Digital I/O Board0100-20003,0100-76124
Digital I/O Board0100-01321
Digital I/O Card0100-11002
ASSY PCB STEPPER CNTRLR W/DAUGHTER CARDS0100-00979
Stepper Controller Board0100-20173
OMS Board0190-01227,0190-76005
SERIPLEX MUX BOARD0190-35651,300299-083
OTF Centerfinder Board0100-76042,0100-01985
Chamber Interface 5200 HDP-CVD Ultima0100-00493
Chamber Interface Board0100-35250
Mainframe Interface Board0100-00265
Analog Sync Detect Board0100-20066
64 CHANNEL MUX Board0100-20000
SERIPLEX MUX I/O Board0190-35650,0190-35651
Seriplex SPX-MUXADIO-0010190-35775
TC AMP Interlock0100-00241
THERMALOGIC Board0660-00221
Wafer Orienter Board0100-76259,0100-20069
CONT ASSY,PRESS PNEU(AMAT CMP ANALOG BOARD, PNEUTRONICS)0500-01091
AMAT INTER LOCK BOARD0100-00573, 0190-00285
MKS CDN 396R BOARD0190-24116
AMAT(300MM) PVD CHAMBER INTER LOCK BOARD REV020190-00285,0090-03868
PVD/IMP CHAMBER INTER LOCK BOARD0180-00328,0100-20458
PED-BIAS CHBR I/L PCB BOARD0090-03710
AS GAS HEATER CONTROL BOARD0100-01911
INTL GAS HEATER CONTROL BOARD0100-02048
AMAT CVD INTERGACE BOARD0190-22844
MASA POWER SYS BOARD 0190-08875
HITACHI MMPC-03A BOARDMMPC-03A
NIKON STEPPER BOARD4S014-104 LASC-100 S91658302
NIKON STEPPER BOARD4S007-395 LC PRESS 340504
PCB ASSY 5 PHASE STEPPER DRIVER INTERFAC0100-35353
AMAT MONOCHROMATOR(EPD)0010-00745,0010-09935,一般REPAIR(OH)
AMAT MONOCHROMATOR(EPD)FULL O/H(PMT(PHOTO MULTIPLIER TUBE交換)