工程(使用シーン)装置Parts NoType
EtchLAM 【 374 】【 608 】【 611 】839-019090-374Ceramic ESC
EtchLAM 【 374 】【 608 】【 611 】839-019090-608Ceramic ESC
EtchLAM 【 374 】【 608 】【 611 】839-019090-611Ceramic ESC
EtchAMAT DPS-Ⅱ ESC (12 インチ0040-33215Spray coat ESC (Single)
EtchAMAT ENABLER( E MAX) (12 インチ)0040-63476Ceramic《 ALN 》 ESC
EtchNOVELLUS CONCEPT SPEED Ⅱ(8 インチ)02-121096-00Ceramic ESC (Cu base)
EtchNOVELLUS CONCEPT SPEED Ⅱ(8 インチ)02-257120-00Ceramic ESC (Cu base)
EtchNOVELLUS CONCEPT SPEED Ⅱ(8 インチ)02-134263-00Ceramic ESC (Cu base)
EtchMATTSON PARADIGM E (12インチ)3004863-4-ACeramic ESC (Heater built in ceramic)
EtchAMAT HDP ESC (8 & 12 インチ)FB320853 (4インチ)Ceramic ESC (Silicone bonded ceramic plate)
EtchAMAT HDP ESC (8 & 12 インチ)715299 (6インチ)Ceramic ESC (Silicone bonded ceramic plate)
EtchAMAT HDP ESC (8 & 12 インチ)716299 (6インチ)Ceramic ESC (Silicone bonded ceramic plate)
EtchAMAT HDP ESC (8 & 12 インチ)FB32143(6インチ)Ceramic ESC (Silicone bonded ceramic plate)
EtchAMAT HDP ESC (8 & 12 インチ)FB319626 (8インチ)Ceramic ESC (Silicone bonded ceramic plate)
CVDAMAT HDP 0040-18219 (8 インチ)Spray coat ESC (Single)
CVDAMAT HDP 0040-18053 (8 インチ)Spray coat ESC (Single)
CVDAMAT HDP 0040-48594 (12 インチ)Spray coat ESC (Single)
CVDNOVELLUS CONCEPT SPEED Ⅲ(12 インチ)02-267289-00Ceramic ESC (Cu base)
CVDNOVELLUS CONCEPT SPEED Ⅲ(12 インチ)15-265814-00Ceramic ESC (Cu base)
ImplantNISSIN ESC (6 &8 インチ)NI97-08586Silicone  Rubber
ImplantULVAC ESC (5& 6 &8 インチ)UL-125-ION-5Silicone Rubber
ImplantULVAC ESC (5& 6 &8 インチ)UL-150-ION-3Silicone Rubber
ImplantULVAC ESC (5& 6 &8 インチ)UL-200-ION-2Silicone Rubber
PVDAMAT CHARGER ESC (12 インチ)0041-11565Spray coat ESC (Single
PVDAMAT CHARGER ESC (12 インチ)0040-52042Spray coat ESC (Single
PVDULVAC ENTRON ESC (12 インチ)Silicone-290-TCA-NT-02Silicone  Rubber
AshingPSK COOLING CHUCK (12インチ)DES002Anodized heater
AshingPSK COOLING CHUCK (12インチ)DES004Anodized heater
TestingPROBER CHUCK (8 インチ)-Al + Ni & Au plating
TestingPROBER CHUCK (12インチ)-Al + Ni plating