メーカー Manufacturer	Description	Model
NSK	Motor	RS0810FN544/RZ0810FN507
NSK	Driver	EP0810AF3-05/EP0810AF5-05/EP0810AF7-05/EP0810AF8-05
NSK	Driver	J1003A/Y2020A/Y3040A
NSK	Servo Motor	M-FZ168
Kollmorgen	Servo Driver	CR10704/CR06250/CR06902
Kollmorgen	Motor	D101A-93-1215-001/D101B-93-1210-014
YASKAWA	Driver	SGDA-04ASY283/SGDB-44ADG/SGDB-75DGY/SGDM-50ADA
Vexta	5-Phase Driver	UDK5114N/UDX5114/UDX5128N
MITSUBISHI	AC Servo Driver	MR-J2-40B/MR-J2S-70/MR-J2S-200CP
Allen-Bradley	Ultra Series Driver	1398-SR3AF/ASM-300
Allen-Bradley	Ultra 3000i Driver	010X/019X/020X/030X/050X
Pfeiffer	Vacuum Turbo Pump Controller	TC600/TIC250/TC750
DDI	I/O Controller	27-10157-00

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Pfeiffer半導体製造装置　修理