◆基板(PCB）修理
【品名】AMAT SBC BOARD(V452, V440)／AMAT VGA BOARD／AMAT VME BOARD／AMAT A/O BOARD／SBC V452／SBC V440／SBC V21／VME PIII 400MHZ／MEI board／VGA video controller board／SEI Board／ANALOG I/O Board／Analog Input Board／Analog Output Board／Digital I/O Board／Digital I/O Card／ASSY PCB STEPPER CNTRLR W/DAUGHTER CARDS／Stepper Controller Board／OMS Board／SERIPLEX MUX BOARD／OTF Centerfinder Board／Chamber Interface 5200 HDP-CVD Ultima／Chamber Interface Board／Mainframe Interface Board／Analog Sync Detect Board／64 CHANNEL MUX Board／SERIPLEX MUX I/O Board／Seriplex SPX-MUXADIO-001／TC AMP Interlock／THERMALOGIC Board／Wafer Orienter Board／CONT ASSY,PRESS PNEU(AMAT CMP ANALOG BOARD, PNEUTRONICS)／AMAT INTER LOCK BOARD／MKS CDN 396R BOARD／AMAT(300MM) PVD CHAMBER INTER LOCK BOARD REV02／PVD/IMP CHAMBER INTER LOCK BOARD／PED-BIAS CHBR I/L PCB BOARD／AS GAS HEATER CONTROL BOARD／INTL GAS HEATER CONTROL BOARD／AMAT CVD INTERGACE BOARD／MASA POWER SYS BOARD ／HITACHI MMPC-03A BOARD／NIKON STEPPER BOARD／PCB ASSY 5 PHASE STEPPER DRIVER INTERFAC／AMAT MONOCHROMATOR(EPD)