半導体製造装置　修理

◆ターボポンプ、ターボポンプコントローラー　修理

【メーカー Manufacturer】 Alcatel／Mitsubishi／Osaka／Shimadzu／Ebara／EDWARDS／Varian／ULVAC／Leybold／Pfeiffer 【ターボポンプ型式】 MDP／ATP／ATH／PT／FT／TG／TH／TMP／TMPV／ET／EXT／STP／V／UTM／TW／MAG／Hipace／TPH／TMH

【メーカー Manufacturer】 Brooks／Genmark ／Kensington／Asyst／IDE ／ADE／AMAT ／RORZE／JEL ／ISEL／TAZMO ／MECS ／Cybeq robot／Canon/Nikon／Axcelis／Kawasaki／Yaskawa／ISEL prealigner／Novellous : PRI／VTR(MAG) series ／HP/VHP

◆ウエハプローバ(Prober)基板

【メーカー Manufacturer】　TSK／TEL 【装置型式】 UF200／UF200A／P8XL【品名】 CPU BOARD／Cognex 4200 Board／ VGAC BOARD／Image relay baord／PROFILE SENSOR／Main driver／PIO Board／Loader PGEN Board／Key CONT／Temperaturer Controller／VIP3／VIP4／MOMI HD Board

◆ウエハテスト装置基板修理

【メーカー Manufacturer】ADVANTEST／Teradyne ／YOKOGAWA　【装置型式(Equipment)】／T5377S／T5377/T5377S／T5375/T5377／T5375/T5377/T5377S／T5365／T5371／T5581／T5585／T5335P／T6731(ND1)／T6732(ND2)／T6733(ND3)／J750／TS6700／ST6730

◆基板(PCB）修理

【品名】AMAT SBC BOARD(V452, V440)／AMAT VGA BOARD／AMAT VME BOARD／AMAT A/O BOARD／SBC V452／SBC V440／SBC V21／VME PIII 400MHZ／MEI board／VGA video controller board／SEI Board／ANALOG I/O Board／Analog Input Board／Analog Output Board／Digital I/O Board／Digital I/O Card／ASSY PCB STEPPER CNTRLR W/DAUGHTER CARDS／Stepper Controller Board／OMS Board／SERIPLEX MUX BOARD／OTF Centerfinder Board／Chamber Interface 5200 HDP-CVD Ultima／Chamber Interface Board／Mainframe Interface Board／Analog Sync Detect Board／64 CHANNEL MUX Board／SERIPLEX MUX I/O Board／Seriplex SPX-MUXADIO-001／TC AMP Interlock／THERMALOGIC Board／Wafer Orienter Board／CONT ASSY,PRESS PNEU(AMAT CMP ANALOG BOARD, PNEUTRONICS)／AMAT INTER LOCK BOARD／MKS CDN 396R BOARD／AMAT(300MM) PVD CHAMBER INTER LOCK BOARD REV02／PVD/IMP CHAMBER INTER LOCK BOARD／PED-BIAS CHBR I/L PCB BOARD／AS GAS HEATER CONTROL BOARD／INTL GAS HEATER CONTROL BOARD／AMAT CVD INTERGACE BOARD／MASA POWER SYS BOARD ／HITACHI MMPC-03A BOARD／NIKON STEPPER BOARD／PCB ASSY 5 PHASE STEPPER DRIVER INTERFAC／AMAT MONOCHROMATOR(EPD)

◆モーター/モータードライバー（MOTOR/DRIVER）修理

【メーカー Manufacturer】 NSK／Kollmorgen／YASKAWA／Vexta／MITSUBISHI／Allen-Bradley／Pfeiffer／DDI 【Description】 Motor／Driver／Servo Motor／Servo Driver／5-Phase Driver／AC Servo Driver／Ultra Series Driver／Ultra 3000i Driver／Vacuum Turbo Pump Controller／I/O Controller 【Model】 RS0810FN544/RZ0810FN507／EP0810AF3-05/EP0810AF5-05/EP0810AF7-05/EP0810AF8-05／J1003A/Y2020A/Y3040A／M-FZ168／CR10704/CR06250/CR06902／D101A-93-1215-001/D101B-93-1210-014／SGDA-04ASY283/SGDB-44ADG/SGDB-75DGY/SGDM-50ADA／UDK5114N/UDX5114/UDX5128N／MR-J2-40B/MR-J2S-70/MR-J2S-200CP／1398-SR3AF/ASM-300／010X/019X/020X/030X/050X／TC600/TIC250/TC750／27-10157-00