| メーカー Manufacturer | ターボポンプ型式 | ターボポンプコントローラー型式 |
|---|---|---|
| Alcatel | MDP5011 | CFV100 |
| Alcatel | MDP5030 | CFF450 |
| Alcatel | MDP5150 | CFF450 |
| Alcatel | MDP5400 / 5402 | CFF450 |
| Alcatel | MDP5900 | CFV450 |
| Alcatel | PTM5081 | CFV100 |
| Alcatel | ATP80 | ACT250 ACT600T |
| Alcatel | ATP100 | ACT200T |
| Alcatel | ATP150 | ACT600T |
| Alcatel | ATP400 | ACT600T |
| Alcatel | ATP900 | ACT600T |
| Alcatel | ATH300 | ACT600T |
| Alcatel | ATH400 / 1000M | ACT600 / 1000M |
| Alcatel | ATH1300M | ACT1300M Magpower controller |
| Alcatel | ATH1600M | ACT1600M Magpower controller |
| Alcatel | ATH1603M | Magpower controller |
| Alcatel | ATH2300M | ACT2300 Magpower controller |
| Alcatel | ATH2303M | Magpower controller |
| Mitsubishi | PT50 | PTI50 |
| Mitsubishi | PT150 | PTI150 |
| Mitsubishi | PT300 | PTI300 |
| Mitsubishi | PT500 | PTI500 |
| Mitsubishi | PT500M | PTI500M |
| Mitsubishi | PT1500 | PTI1500 |
| Mitsubishi | FT350 / 480W | FTI350 / 480W FTIXXXX-D1 FTIXXXX-D3 |
| Mitsubishi | FT600D | FTI600D |
| Mitsubishi | FT700 | FTI700 |
| Mitsubishi | FT700W | FTI700W |
| Mitsubishi | FT800W | FTI800W FTIXXXX-D1 FTIXXXX-D3 |
| Mitsubishi | FT1200W | FTI1200W |
| Mitsubishi | FT1400W | FTI1400W FTIXXXX-D1 FTIXXXX-D3 |
| Mitsubishi | FT2001W | FTI2001W |
| Mitsubishi | FT2200W | FTI2200W |
| Mitsubishi | FT2300W | FTI2300W FTIXXXX-D1 FTIXXXX-D3 |
| Mitsubishi | FT3300W | FTI3300 |
| Mitsubishi | FT3301W | FTI3301W FTIXXXX-D1 FTIXXXX-D3 |
| Mitsubishi | FT3302W | FTI3302 FTIXXXX-D1 FTIXXXX-D3 |
| Mitsubishi | FT3500D | FTI3500D FTIXXXX-D3 |
| Osaka | TG50 | TC50 |
| Osaka | TG70 | TC76 |
| Osaka | TF160 | TC160 / 200 |
| Osaka | TH162 | TC160 / 200 |
| Osaka | TH1502BW | TC1100 |
| Osaka | TH350 | TC350 |
| Osaka | TH520 | TC520 |
| Osaka | TG200 / 203 | TC200 |
| Osaka | TG220F | TC223 |
| Osaka | TG350F | TC353 |
| Osaka | TG450F | TC353 |
| Osaka | TS440 / 443 | TC440 |
| Osaka | TG550 / 553 | TC550 |
| Osaka | TG800F | TC1103 TC1104 |
| Osaka | TG1003 | TC1003 |
| Osaka | TG1100F | TC1103 TC1104 |
| Osaka | TG1300 / 1303 | TC1103 TC1104 |
| Osaka | TG1400 | TC1103 TC1104 |
| Osaka | TG1810 / 1813 / 1815 | TC1800 |
| Osaka | TG3213 | TC3213 |
| Osaka | TG2400F | TC2403 |
| Osaka | TG360M | TD360 |
| Osaka | TG370/373/374 M | TD370 |
| Osaka | TG380M | TD381/411 |
| Osaka | TG390M | TC010M TC011M |
| Osaka | TG400M | |
| Osaka | TG1100M | TD711/1111 |
| Osaka | TG1110/710M | TD711/1111 |
| Osaka | TG1113/713M | TD711/1111 |
| Osaka | TG1133/733M | TD711/1111 |
| Osaka | TG420M | TC010M TC011M |
| Osaka | TG900M | TC010M TC011M |
| Osaka | TG1300M | TC010M TC011M |
| Osaka | TG2400M | TC010M TC011M |
| Osaka | TH1502BW | TC1500 |
| Osaka | TG2000 / 2003M | TD2000 TD2001 |
| Osaka | TiG 2204MUWB-B44 | コントローラー一体型 |
| Osaka | TG2300M | TD2300 TC021M |
| Osaka | TG2810 / 2813 M | TD2800 |
| Osaka | TG3203M | TD3200 TD3213 |
| Osaka | TG3213M | TD3200 TD3213 |
| Osaka | TG3220M | |
| Osaka | TG3240M | |
| Osaka | TG3253M | TD3253 |
| Osaka | TG3410 / 3413M | |
| Osaka | TG3451M | |
| Osaka | TG3460M | TC020M TC021M |
| Shimadzu | TMP51D | EI51 |
| Shimadzu | TMP280L | EI280 EI281 |
| Shimadzu | TMP550L | EI550 |
| Shimadzu | TMP1000LK | EI1000 EI1001 |
| Shimadzu | TMP1500L | EI1500 |
| Shimadzu | PT1500 | PTI1500 |
| Shimadzu | TMP200M | EI200M |
| Shimadzu | TMP202M | EI202M |
| Shimadzu | TMP203M | EI203M EID203M EIS04M |
| Shimadzu | TMP303/403LM | EI303M EID303M EIS04M |
| Shimadzu | TMP802/1002M | EI1002M |
| Shimadzu | TMP803 / 1003M | EI803/1003M EID803/1003M EIR04M |
| Shimadzu | TMP1103M | EIR04M |
| Shimadzu | TMP1303M | EI1303M EID1303M EIR04M |
| Shimadzu | TMP1503M | EI1503M EID1503M EIR04M |
| Shimadzu | TMP2001M | EI2001M |
| Shimadzu | TMP2003M | EI2003M |
| Shimadzu | TMP2203M | EID2203M EIR04M |
| Shimadzu | TMP 2403M | EIR04M |
| Shimadzu | TMPW2403M | EIR04M |
| Shimadzu | TMP2804LMTF | EIR04M |
| Shimadzu | TMP3001M | EI3001M |
| Shimadzu | TMP3003M | EI3003M |
| Shimadzu | TMP3203M | EID3203M ETR04M |
| Shimadzu | TMP3304M | EIR04M |
| Shimadzu | TMP3403M | EID3403M EIR04M |
| Shimadzu | TMPH3603M | EID3603M |
| Shimadzu | TMP3804/4304 M | EIR04M |
| Shimadzu | TMPV1704LM | Set with Controller |
| Shimadzu | TMPV2304LM | Set with Controller |
| Shimadzu | TMPV3304 | Set with Controller |
| Ebara | ET300WS | ET300 ET305 ET306 |
| Ebara | ET300C | ET300 ET305 ET306 |
| Ebara | ET300P | ET300 ET305 ET306 |
| Ebara | ET300UZ | ET300 ET305 ET306 |
| Ebara | ET450C | ET450 ET456 |
| Ebara | ET600WS | ET600 ET606 |
| Ebara | ET601H | ET600 ET606 |
| Ebara | ET800WS | ET800 ET804 ET806 |
| Ebara | ET800H | ET800 ET804 ET806 |
| Ebara | ET801H | ET800 ET804 ET806 |
| Ebara | ET1301W | ET1301 |
| Ebara | ET1600WS | ET1604 ET1605 ET1606 |
| EDWARDS | EXT70 | EXDC80 |
| EDWARDS | EXT200/200H/30 | EXC120 |
| EDWARDS | EXT255H | EXDC160 |
| EDWARDS | STP200 | SCU200 |
| EDWARDS | STPH200 | SCUH200 |
| EDWARDS | STP300 / 400 | SCU300/400 |
| EDWARDS | STPH300C/H400C | SCUH300/400 |
| EDWARDS | STP301 / 451 | SCU301/451 |
| EDWARDS | STPH301 / H451 | SCUH301/451 |
| EDWARDS | STPL451 | SCUL451 |
| EDWARDS | STPH751 | SCUH751 |
| EDWARDS | STPH1301 | SCUH1301 |
| EDWARDS | STP600 / 1000 | SCU600/1000 |
| EDWARDS | STPH600 / H1000 | SCUH600/1000 |
| EDWARDS | STP603 / 1003 | SCU603/1003 SCU800 |
| EDWARDS | STPH803 / H1303 | SCUH803/1303 SCU800 |
| EDWARDS | STPA803 / A1303 | SCUA803/1303 SCU800 |
| EDWARDS | STPA1603 | SCUA1603 SCU800 |
| EDWARDS | STP2000 | SCU2000 |
| EDWARDS | STPH2001 | SCUH2001 |
| EDWARDS | STPH2002 | SCUH2002 |
| EDWARDS | STPA2203C | SCUA2203 SCU1400 SCU1500 SCU1600 |
| EDWARDS | STPF2203C | SCUF2203 SCU1400 SCU1500 SCU1600 |
| EDWARDS | STPA2503 / 3003 | SCUA2503 / 3003 SCU1400 SCU1500 SCU1600 |
| EDWARDS | STPXA2703 / 3203 | SCUXA2703 / 3203 SCU1400 SCU1500 SCU1600 |
| EDWARDS | STPXH2603 / 3203 | SCUXH2603 / 3203 SCU1400 SCU1500 SCU1600 |
| EDWARDS | STPA3503 | SCUA3503 SCU1400 SCU1500 SCU1600 |
| EDWARDS | STPXA4503 | SCUXA4503 SCU1400 SCU1500 SCU1600 |
| EDWARDS | iXR1606 | Set with Controller |
| EDWARDS | iXA2206C | Set with Controller |
| EDWARDS | STP-iXA3306C | Set with Controller |
| Varian | V70 | V70 |
| Varian | V81 | V81 |
| Varian | V200 | V200 |
| Varian | V250HT | V250 |
| Varian | V300H | V300 |
| Varian | V301 | V301 |
| Varian | V450 | V450 |
| Varian | V550 | V550 |
| Varian | V551 | V551 |
| Varian | V700 | V700 |
| Varian | V750 / 850 | V750 / 850 |
| Varian | V801 | V801 |
| Varian | V902 | V902 |
| Varian | TV1000A | V1000A |
| Varian | V1000HT | V1000 |
| Varian | V1001 | V1001 |
| Varian | V1800/V1800A | V1800 |
| ULVAC | UTM50 | PTI50 |
| ULVAC | UTM150 | PTI150 |
| ULVAC | UTM300 | PTI300 |
| ULVAC | UTM500 | PTI500 |
| ULVAC | UTM1500 | PTI1500 |
| ULVAC | UTM350 / 480 FW | FTI350 / 480W FTIXXXX-D1 FTIXXXX-D3 |
| ULVAC | UTM800FW | FTI800W FTIXXXX-D1 FTIXXXX-D3 |
| ULVAC | UTM1400FW | FTI1400W FTIXXXX-D1 FTIXXXX-D3 |
| ULVAC | UTM1500FW | |
| ULVAC | UTM 2300FW/D1B | FTI2300W FTIXXXX-D1 FTIXXXX-D3 |
| ULVAC | UTM3301FW | FTI3301W FTIXXXX-D1 FTIXXXX-D3 |
| ULVAC | UTM3302 | FTI3302 FTIXXXX-D1 FTIXXXX-D3 |
| ULVAC | UTM3303FH | FTI3303 FTIXXXX-D1 FTIXXXX-D3 |
| Leybold | TMP35 / 50 | NT10 NT12 |
| Leybold | TMP150 / 151 | NT150/360 NT151/361 NT20 TD20 |
| Leybold | TMP360 / 361 | TCP380 NT20 TD20 |
| Leybold | TMP450 | NT450 |
| Leybold | TMP600C | NT20 |
| Leybold | TMP1000C | NT20 TD20 |
| Leybold | TMP1100C | NT20 TD20 |
| Leybold | TW70H | TD300 |
| Leybold | TW250 | TD400 TC400 |
| Leybold | TW290 | TD300 |
| Leybold | TW701 | |
| Leybold | T1600 | |
| Leybold | TMP340MCT | NT340M |
| Leybold | MAG400 | NT340M |
| Leybold | MAGW800 / 1300C | MAG DRIVE digital |
| Leybold | MAG900 / 1000 | MAG DRIVE 1000 |
| Leybold | MAG2000CT | MD 2000 MAG DRIVE 2000 |
| Leybold | MAGW2010CHT | MAG DRIVE digital |
| Leybold | MAGW2200 | MAG DRIVE digital |
| Pfeiffer | SplitFlow50 | TC110 |
| Pfeiffer | Hipace 80 SplitFlow80 | TC110 |
| Pfeiffer | Hipace 300 | TC110 |
| Pfeiffer | Hipace 1200 | TC1200 |
| Pfeiffer | Hipace 1500 | TC1200 |
| Pfeiffer | Hipace 2300 | TC1200 |
| Pfeiffer | TPH055 / TPH(U)062 / TMH(U)063 / TMH(U)064 / TMH(U)065 | TCS015 TCP015 TCP151 |
| Pfeiffer | TMH(U) 071P | TC600 |
| Pfeiffer | TPH(U) 170 | TCP300 |
| Pfeiffer | TPH(U) 240 | TCP121 |
| Pfeiffer | TMH(U)260/261/262 | TCP380 |
| Pfeiffer | TPH330 | TCP380 |
| Pfeiffer | TPH(U) 510 | TCP270 TCP380 |
| Pfeiffer | TMH(U) 520/521 | TC600 TC750 |
| Pfeiffer | TMH(U) 1000 | TC600 |
| Pfeiffer | TMH1001/1001P | TC600 |
| Pfeiffer | TMH(U)1600 | TCP600 |
| Pfeiffer | TMH(U)1601 | TC600 |
| Pfeiffer | TPH1201 | TC750 |
| Pfeiffer | TPH1501 | TC600 |
| Pfeiffer | TPH1600 | TCP600 |
| Pfeiffer | TPH2101 | TC750 |
| Pfeiffer | TPH(U)2200 | TCP5000 |
| Pfeiffer | TPH2301 | TC750 |
水戸工業（株）4G | 信頼性と技術力で次世代の半導体産業社会を支えていきます。
